About: http://webisa.webdatacommons.org/453030179

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The semiconductor device such as FCT or FET fabricated by the method of the invention is substantially free from auto-doping and therefore is uniform in the channel width.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com