PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • The substrate 210, 220 of each wafer 201, 202 typically comprises a semiconductor material, such as Silicon (Si), Silicon-on-Insulator (SOI), Gallium Arsenide (GaAs), etc.
http://www.w3.org/ns/prov#wasQuotedFrom
  • google.es