PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • This passivating film is the same as that used in conventional wafer processing and consists of an insulating material such as silicon oxide, silicon nitride, or the like.
http://www.w3.org/ns/prov#wasQuotedFrom
  • google.com