About: http://webisa.webdatacommons.org/453214172

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	This layer 28 may be deposited by CVD, sputtering, or other techniques known in the art.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com