About: http://webisa.webdatacommons.org/453337894

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The subject exposure systems include, but are not limited to, lithography systems as used for fabricating microelectronic devices such as integrated circuits and displays.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com