| http://www.w3.org/ns/prov#value | - Further, the wafer transfer arm 24 is formed such as to be rotatable in the ?? direction and movable in the Y direction, and therefore it is able to access to the extension unit EXT which belongs to the fourth processing unit group G4 situated on the processing station 11 side, and a wafer receiving table of the exposure processing unit (not shown) adjacent to the extension unit.
|
