About: http://webisa.webdatacommons.org/453554351

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Furthermore, a reactive gas including nitrogen is introduced from a nitrogen gas source 209 to the vicinity of the substrate in the processing chamber 100 via a valve 210, a mass flow controller 211, and a valve 212.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com