About: http://webisa.webdatacommons.org/453684548

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Projection exposure apparatus 10 comprises an illumination optical system 12 that contains a light source 14 emitting an exposure light beam 16 having a wavelength in the extreme ultraviolet, e.g. 13 nm.
http://www.w3.org/ns/prov#wasQuotedFrom	google.de