| http://www.w3.org/ns/prov#value | - An optical profiler system in accordance with claim 23 wherein said range is given by the expression |p+z-z0 |???L/2 where L is said equivalent coherence length, is the local surface height, z is the scan position, and zo is a constant, whereby p varies with the position on said object surface and comprises a measure of the object surface topography.
|
