About: http://webisa.webdatacommons.org/453927860

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In depositing the interconnecting metal film such as an Al or Al alloy film, sputtering or CVD is used.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com