| http://www.w3.org/ns/prov#value | - Indirect patternable materials include, for example, spin-on glass materials, polyimide, polybenzoxazole, polyglutarimide, benzocyclobutene, polymers such as polyethylene (PE), polystyrene (PS), polypropylene (PP), or inorganic materials such as SiO2, Si3N4, and AL2O3.
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