About: http://webisa.webdatacommons.org/453969091

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In some embodiments, layer 140 is undoped silicon dioxide and/or BPSG, 1-2 ??m thick, e.g. 1 ??m thick.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com