About: http://webisa.webdatacommons.org/454030634

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	An advantage of the present invention is a method of manufacturing a high density, sub-micron dimensioned integrated semiconductor device with an improved self-aligned contact structure.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com