About: http://webisa.webdatacommons.org/454088354

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Unfortunately, there are a number of problems created by using undoped SiO2 on BPSG for dual damascene.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com