About: http://webisa.webdatacommons.org/454155857

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Substrate 12 is preferably a flat large area substrate composed of glass or quartz, although other materials such as silicon, polymers or metals can be used.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au