About: http://webisa.webdatacommons.org/454182177

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Such a recess may be particularly advantageous in embodiments in which the workpiece is a semiconductor wafer and the thermally induced motion includes therm
http://www.w3.org/ns/prov#wasQuotedFrom	google.com