PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • Surface areas not having overlying photoresist are etched to remove unwanted, underlying material such as silicon dioxide, silicon nitride, or metallization.
http://www.w3.org/ns/prov#wasQuotedFrom
  • google.com