About: http://webisa.webdatacommons.org/454612331

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http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 7 is a graph showing the experimental results of autodoping from boron and arsenic regions at different temperatures of epitaxial deposition.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com