About: http://webisa.webdatacommons.org/454618752

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 5 is a cross-section depiction of a fixed-abrasive CMP of the present invention being applied to form a contact structure wherein the surface tension of the polishing solution is such that an oblique contact angle is formed.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es