About: http://webisa.webdatacommons.org/454754619

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	First, an aluminum nitride film 602 having a thickness of from 0.1 to 2 ??m, preferably from 0.2 to 0.5 ??m, or for example 0.3 ??m, was deposited onto the substrate 601 by reactive sputtering, in the same manner as in Example 4.
http://www.w3.org/ns/prov#wasQuotedFrom	google.ca