About: http://webisa.webdatacommons.org/455088940

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	It is apparent that an inorganic material such as silicon oxide, silicon nitride, or silicon oxynitride can be used to form the interlayer insulating film 111.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com