About: http://webisa.webdatacommons.org/45536342

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	wherein N is an integer greater than or equal to 1, whereby the device forms a 2N???2N array of microelectromechanical devices. 12.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com