About: http://webisa.webdatacommons.org/455524487

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Suitable substrates are e.g. oxidized silicon wafers or flat sheets consisting of SiNx or a ceramic material or a metal.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com