PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • For example, if the IC pattern is a mask, the irregular edges of feature 100 b can result in unreliable print quality and patterning defects leading to inconsistent device performance.
http://www.w3.org/ns/prov#wasQuotedFrom
  • google.com