| http://www.w3.org/ns/prov#value | - To determine the surface and subsurface characteristics (e.g., inhomogenieties, such as cracks or subsurface fatigue) the excitation beam is pointed to a plurality of different positions (Xo, Yo) on the sample surface and the optical probe beam 18 is projected to intersect with the excitation beam 10 for each new position of the excitation beam 10.
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