About: http://webisa.webdatacommons.org/456041357

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	However, the practicality of such lithography as a manufacturing tool is hard to judge at this point.
http://www.w3.org/ns/prov#wasQuotedFrom	google.ca