| http://www.w3.org/ns/prov#value | - Now a detailed embodiment of a sputtering apparatus of the present invention, including a mechanism for loading and unloading of a member to be sputter-treated using a lid which closes a supply opening provided on a vacuum chamber through which the member to be sputter-treated is loaded and unloaded, will be described with reference to FIGS. 15-25.
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