| http://www.w3.org/ns/prov#value | - Some of the substrate materials that may be used include, but are not limited to, Silicon or a derived Silicon surface such as Silicon dioxide or Silicon Nitride, glass, quartz, ceramics, a wide variety of polymers such as PDMS, PMMS, PC, COC, or a combination of listed substrates such as a glass substrate with a coated film of PMMA on the surface.
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