About: http://webisa.webdatacommons.org/456268079

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	By irradiating laser light or other light as strong as laser light to a silicon film having crystal character, a thin silicon oxide film can be formed on the surface of the silicon film.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es