About: http://webisa.webdatacommons.org/456443143

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In one implementation, the Ge-based surface material is treated, prior to deposition of the dielectric layer, to remove and/or chemically modify native GeO.sub.x (i.e., where x is a number less
http://www.w3.org/ns/prov#wasQuotedFrom	patents.com