About: http://webisa.webdatacommons.org/456445023

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A next layer of a sacrificial material such as silicon dioxide, metal or photoresist 112 is layered on top of the patterned layers 102 and patterned by conventional photolithography techniques.
http://www.w3.org/ns/prov#wasQuotedFrom	freepatentsonline.com