| http://www.w3.org/ns/prov#value | - ntered with these types ofresists.These and other objectives are achieved by the present invention in that the resists contain a photoactive component in the form of a bisazide and in that the polybenzoxazole precursors are hydroxypolyamides having the following structure:##STR2## wherein R, R*, R.sub.1, R.sub.1 * and R.sub.2 are aromatic groups, R.sub.3 is
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