| http://www.w3.org/ns/prov#value | - An examples is a situation that an SOD (Spin-on-Dielectric) film, an SOG film or the like is formed as an inter-layer insulation film on a substrate which comprises an interconnection pattern of metal or the like, or a situation that a conductive thin film is buried in a substrate which comprises a hole, such as a contact hole, a groove-shaped element, etc.
|
