About: http://webisa.webdatacommons.org/45823643

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Gas discharge lasers, particularly excimer lasers, are uniquely suited for such applications due to the combination of short discharge wavelength with high power.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com