About: http://webisa.webdatacommons.org/46682454

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	the opening of the resist mask is formed in a manner which allows a region including a bit line and a word line of a memory portion to be exposed. 23.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com