About: http://webisa.webdatacommons.org/47134950

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	If the etchant attacks the bias electrodes, small thin rectangles of stop etch material, e.g. titanium-tungsten or other metal, can be deposited and patterned where the vias are located, prior to etching the buffer.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com