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http://webisa.webdatacommons.org/47206167
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Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value
If fill structures 36 include a conductive material such as a metal, the fill structures may serve as contacts between the source and drain regions and interconnect lines formed upon the fill structures (not shown).
http://www.w3.org/ns/prov#wasQuotedFrom
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