About: http://webisa.webdatacommons.org/47227964

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Here, an aluminum film or a film mainly containing aluminum is used as the shielding film 6058, and an aluminum oxide film (alumina film) is used as the dielectric substance 6059.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com