About: http://webisa.webdatacommons.org/47573277

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Referring to example FIG. 2B, a first liner silicon nitride film 208 is then deposited on and/or over the entire surface of the semiconductor substrate 200 including the trenches.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au