About: http://webisa.webdatacommons.org/4768594

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Suitable masks 554-556 can be applied to defect maps 551-553, respectively, to exclude areas such as the wafer edges, etc.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com