About: http://webisa.webdatacommons.org/47692113

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	MEMS is a developing technology which produces IMUs using silicon wafers made from
http://www.w3.org/ns/prov#wasQuotedFrom	justice.gov