About: http://webisa.webdatacommons.org/47830259

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 1 is a vertical cross sectional view of a portion of a semiconductor substrate as subjected to a step of the method according to an embodiment of the invention.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com