About: http://webisa.webdatacommons.org/47837833

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 5 is a plan view a portion of the top cover with a portion thereof undercut so as to permit a hermetic glass seal of the top cover, sensor and bottom substrate.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au