About: http://webisa.webdatacommons.org/47869543

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 3A is a schematic drawing showing conveying of semiconductor composition material from one horizontal conveyer unit to another through a vertical conveyer unit.
http://www.w3.org/ns/prov#wasQuotedFrom	google.co.uk