About: http://webisa.webdatacommons.org/47928288

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 10B is a partially exploded perspective view of the CMP polisher of FIG. 10A;
http://www.w3.org/ns/prov#wasQuotedFrom	google.es