About: http://webisa.webdatacommons.org/47935810

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Film 60 is a material that is selectively etchable with respect to quartz and chromium, such as carbon, polymers, many inorganic films, and metals, including copper.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com