About: http://webisa.webdatacommons.org/47958373

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 1 is a schematic cross section of the structure inside the etching chamber in a first embodiment of the semiconductor manufacturing apparatus of this invention;
http://www.w3.org/ns/prov#wasQuotedFrom	google.com