About: http://webisa.webdatacommons.org/48058352

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Significant aspects of the invention include employing a polymer material such as a polyimide as the micromachinable material, in layers 25 microns thick or thicker.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es