About: http://webisa.webdatacommons.org/48421827

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Materials, such as Ta, TaN, Ti, TiN, and Al, etc., in contact with these films may react with the fluorine and/or fluorine bearing species thereby compromising the interfacial adhesion between the films and materials.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com