About: http://webisa.webdatacommons.org/4859903

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Furthermore, process gases such as O2, CF4, CL2, NH2, etc., can be introduced onto the wafer surface in the upper section.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com